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Atomically thin two-dimensional (2D) materials exhibit extraordinary optical, electrical, and mechanical properties. Many functional nanostructures and devices of exceptional performance based on 2D materials have been demonstrated. However, the processing of 2D materials remains challenging due to inadequacies that are mainly driven by high fabrication cost, complex steps, and inefficient impurity control. On the other hand, laser-aided processing techniques offer versatility, nanoscale precision, and high throughput. Numerous efforts have showcased the implementation of laser processing and functionalization of 2D materials to control their physical properties and optimize device functionality. In this Perspective, we summarize research progress on laser-enabled thinning, patterning, doping, and functionalization of 2D materials. Continuing advances in optical processing techniques are anticipated to further accelerate the deployment of 2D materials and devices in many fields, including photonics, optoelectronics, and sensor applications. 

Abstract 2D transition metal dichalcogenides (TMDCs) have emerged as a promising class of materials for broad applications. The physical properties of TMDCs are dominated by strong excitonic effects, which critically determine the performance of photonic and optoelectronic devices. In this Review, the current state of research on exciton dynamics in TMDCs is summarized, discussed common optical characterization techniques, and analyzed factors that influence exciton behaviors, such as thickness, dielectric environment, strain, and heterostructure configuration. Throughout this work, the challenges and opportunities for future research in this rapidly evolving field are also highlighted. 

Abstract Recent advancements in manufacturing, finite element analysis (FEA), and optimization techniques have expanded the design possibilities for metamaterials, including isotropic and auxetic structures, known for applications like energy absorption due to their unique deformation mechanism and consistent behavior under varying loads. However, achieving simultaneous control of multiple properties, such as optimal isotropic and auxetic characteristics, remains challenging. This paper introduces a systematic design approach that combines modeling, FEA, genetic algorithm, and optimization to create tailored mechanical behavior in metamaterials. Through strategically arranging 8 distinct neither isotropic nor auxetic unit cell states, the stiffness tensor in a 5 × 5 × 5 cubic symmetric lattice structure is controlled. Employing the NSGA-II genetic algorithm and automated modeling, we yield metamaterial lattice structures possessing both desired isotropic and auxetic properties. Multiphoton lithography fabrication and experimental characterization of the optimized metamaterial highlights a practical real-world use and confirms the close correlation between theoretical and experimental data. 

We demonstrate the laser mediated atomic layer etching (ALEt) of silicon. Using a nanosecond pulsed 266 nm laser focused loosely over and in a parallel configuration to the surface of the silicon, we dissociate Cl2 gas to induce chlorination. Then, we use pulsed picosecond irradiation to remove the chlorinated layer. Subsequently, we perform continuous wave (CW) laser annealing to eliminate amorphization caused by the picosecond laser etching. Based on atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), we observed strong evidence of chlorination and digital etching at 0.85 nm etching per cycle with good uniformity.